Fluidic Packaging of Microengine and Microrocket Devices for High-Pressure and High-Temperature Operation
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چکیده
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ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 2004
ISSN: 1057-7157
DOI: 10.1109/jmems.2003.823223